字号·· | 护眼
日经

日本Resonac开发出可产出4倍芯片的大尺寸晶圆Japan's Resonac develops large wafers that can yield 4 times as many chips

点「原文对照」整页切到原文,或双击某段只看那段的原文。

东京讯 —— 半导体材料制造商Resonac Holdings已成为日本首家开发出300毫米碳化硅(SiC)衬底的企业,该产品产出的集成电路数量是现有衬底的四倍。

TOKYO -- Semiconductor materials maker Resonac Holdings has become the first company in Japan to develop a 300-mm silicon carbide (SiC) substrate, a product that can produce quadruple the amount of integrated circuits compared with current substrates.

Resonac成功加工出300毫米(即12英寸)单晶SiC衬底,其产出芯片数量是目前广泛使用的主流150毫米衬底的四倍。若更大尺寸衬底成为主流,将有助于提升功率半导体的能效,并大幅降低量产成本。

Resonac successfully processed a 300-millimeter -- or 12-inch -- single-crystal SiC substrate, which can yield four times as many chips as the current mainstream 150-mm substrates that are now widely used. If the larger substrates become mainstream, they could improve the energy efficiency of power semiconductors and significantly lower mass production costs.

一家中国半导体设备制造商的代表周一在横滨举行的ICSCRM 2026(一场大型国际SiC会议)参观Resonac展位后表示:“要在该尺寸下保持厚度均匀并非易事。”

"Maintaining uniform thickness at this size isn't easy," a representative of a Chinese semiconductor equipment maker said Monday after visiting Resonac's exhibition booth at ICSCRM 2026, a major international SiC conference held in Yokohama.

衬底是作为半导体生产基底的晶体板材,构成了功率半导体制造商用SiC外延晶圆的核心。Resonac主要生产150毫米衬底,供应给汽车零部件制造商以及罗姆等自产晶圆的半导体器件制造商。在外部销售方面,Resonac占据全球最大份额,超越了美国Wolfspeed。

Substrates are crystalline plates that serve as the base for semiconductor production. They form the core of SiC epitaxial wafers for power semiconductor makers. Resonac produces mainly 150-mm substrates and supplies them to auto parts makers as well as semiconductor device manufacturers such as Rohm that produce wafers in-house. Resonac holds the world's largest share of external sales, beating out U.S.-based Wolfspeed.

全球对数据中心需求的增长正推高对SiC晶圆的预期,后者相比传统硅晶圆具有更优的功率效率和更低的热相关能量损耗。据富士经济研究院预测,全球功率半导体晶圆市场规模将从2025年到2035年大约扩大三倍,其中SiC晶圆将占据近70%的份额。

Growing global demand for data centers is fueling expectations for SiC wafers, which offer better power efficiency and lower heat-related energy loss compared to conventional silicon wafers. The global market for power semiconductor wafers is projected to roughly triple by 2035 from 2025 levels, according to research firm Fuji Keizai, with SiC wafers accounting for just under 70% of the market.

挑战在于扩大晶圆直径。按面积计算,300毫米晶圆在硅晶圆市场占比70%,是半导体制造的主流规格,但该尺寸的SiC衬底尚未实现商业化量产。

The challenge is increasing wafer diameter. While 300-mm wafers account for 70% of the silicon wafer market by area and are mainstream in semiconductor manufacturing, SiC substrates of that size have not been commercialized.

其中一个原因是,在制造 SiC 外延晶圆必不可少的晶体生长过程中,温度会超过 2000 摄氏度,这使得材料容易产生缺陷。用于制造外延晶圆的晶锭也极其坚硬,需要先进技术对其进行切割和抛光,使其变得平整光滑。

One reason is that temperatures exceed 2,000 C during the crystal growth process essential to SiC epitaxial wafer production, making the material prone to defects. The ingots used to make epitaxial wafers are also extremely hard, requiring advanced technology to cut and polish them to become even and flat.

Resonac(瑞萨科)于 2023 年 1 月通过昭和电工与昭和电工材料(原日立化成)的整合而成立。昭和电工于 2009 年进军 SiC 外延晶圆市场,并逐步将晶圆直径从 76.2 毫米(即 3 英寸)扩大。

Resonac was formed in January 2023 through the integration of Showa Denko and Showa Denko Materials, formerly Hitachi Chemical. Showa Denko entered the SiC epitaxial wafer market in 2009 and has gradually increased wafer diameter from 76.2 mm, or three inches.

Resonac 器件解决方案事业部门(负责开发半导体材料技术)的周防弘正表示:“通过常规 SiC 基板的开发与量产,我们积累了大尺寸基板的加工专长,其中包括再结晶过程中的精确温度控制,以及抑制应力(可防止基板翘曲或开裂)的技术。” 美国和中国企业在开发 300 毫米 SiC 基板方面处于领先地位。中国的 SICC(中科晶上)于 2024 年 11 月开发出了据称业界首个该尺寸的 SiC 基板,而 Wolfspeed(沃尔夫斯比德)则于今年 1 月成功生产出单晶基板。

"Through the development and mass production of conventional SiC substrates, we've accumulated the processing expertise for larger diameters," said Hiromasa Suo of Resonac's device solutions unit, which develops semiconductor materials technology. "That includes precise temperature control during recrystallization and techniques for suppressing stress [that can cause substrates to warp or crack]." U.S. and Chinese companies are leading in developing 300-mm SiC substrates. China's SICC developed what it said was the industry's first SiC substrate of that size in November 2024, while Wolfspeed succeeded in producing a single-crystal substrate in January this year.

但目前尚无公司开启全面商业化量产。功率半导体制造商需要在设备上进行大规模投资,而要实现成本效益,则需要具备能够持续稳定量产低缺陷基板的供应体系。

But no company has yet embarked on full-scale commercialization. Power semiconductor manufacturers would need to make substantial investments in equipment, while achieving cost benefits would require a supply system capable of consistently mass-producing substrates with few defects.

目前,Resonac 计划在评估 300 毫米基板的前景(基于客户需求)的同时,强化 200 毫米基板的产能,后者正逐步取代 150 毫米产品。"300毫米市场的玩家格局尚未确立,"瑞萨科(Resonac)首席执行官高桥秀仁表示。"如果客户有需求且我们能预期先发优势,我们将考虑投资。" 2026年1月至6月期间,半导体与电子材料占瑞萨科核心营业利润888亿日元(约合5.64亿美元)的90%以上。该公司的主要盈利驱动力是用于半导体制造后道工序的材料,包括封装材料和散热材料。

For now, Resonac plans to strengthen production capacity for 200-mm substrates, which are gradually replacing 150-mm products, while assessing the prospects for 300-mm substrates based on customer demand. "The positions of the players [in the 300-mm market] haven't been established yet," said Resonac CEO Hidehito Takahashi. "If customers need them and we can expect a first-mover advantage, we'll consider investing in it." Semiconductor and electronic materials accounted for more than 90% of Resonac's 88.8 billion yen ($564 million) in core operating profit for the January-June period of 2026. The company's main earnings drivers are materials used in the back-end stage of semiconductor manufacturing, including encapsulation and heat-dissipating materials.

一位日本分析师表示,如果瑞萨科不仅能在用于前道电路形成的高纯度气体和高性能抛光材料领域,还能在前道工序初期的晶圆制造技术方面提升影响力,"将产生显著的连锁效应,因为公司能够解决客户在广泛工序中的技术课题。"

If Resonac can increase its presence not only in high-purity gases and high-performance polishing materials used in front-end circuit formation, but also in wafer manufacturing technology at the beginning of the front-end process, "it would have a significant ripple effect because the company could solve customers' technological challenges across a broad range of processes," a Japanese analyst said.

一位国内业内人士表达了乐观态度,称:"日本因半导体领域缺乏体系化而落后于海外竞争对手,但300毫米SiC衬底可能成为实现反超的决定性技术。"

An individual in the domestic industry expressed optimism, saying, "Japan has fallen behind overseas competitors because of a lack of systematization in semiconductors, but 300-mm SiC substrates could become a decisive technology for a comeback."